多晶制绒工艺与设备的研究

The Technics and Equipment Research of Multi-crystalline Texturing

对多晶硅片的制绒方法进行了比较,分析了多晶酸制绒的反应机理,在此基础上设计研究了针对多晶酸制绒的设备。

In this paper,the methods of multi-crystalline silicon texturing were introduced.And the basis principles of the acid texturing process of multi-crystalline silicon wafers was analyzed.On the basis,the equipment of the texture making on the multi-crystalline silicon wafers was designed and described.