合成亚波长窄带高反射滤波器的性能研究

STDIES OF FILTING PROPERTY WITH NARROW BANDWIDTH AND HIGH REFLECTIVITY OF MIXED SUB WAVELENGTH FILTER

把亚波长光栅的全反射特性与干涉薄膜的减反射特性相结合，构成“合成亚波长微结构薄膜”（ＭＳＭＦ）．用矢量衍射理论，从理论上探讨了ＭＳＭＦ制作窄带高反射滤波器的可靠性．结果表明，这种滤波器具有反射率峰值高，旁带低和相对半宽度窄的特点．

The mixed sub wavelength micro structure film is formed by combining the all reflectivity characteristic of the sub wavelength gratings with the antireflection characteristic of optical film.Using vector diffraction theory inquires into the possibility of manufacturing filters with narrow bandwidth and high reflectivity by means of MSMF.It shows that this filter has such characteristics as high reflectivity peak value up to 100%,narrow relative half width,low side band reflectivity.