超声喷雾共沉淀法制备纳米氧化锡粉体及其气敏性研究

Gas Sensing Characteristics of Nano-SnO_2 Prepared by Ultrasonic Atomization and Co-Precipitation Method

采用超声波喷雾技术,以SnCl4.5H2O和CO（NH2）2为前驱体原料制备了氧化锡以及Ce稀土离子掺杂纳米粉体。详细地研究了超声喷雾条件、反应时间以及化学组分对纳米SnO2粉体的形貌和尺寸的影响规律,以及前驱体沉淀物脱水化学处理的条件。用XRD,TEM研究了所获纳米粒子的晶相和形貌。结果表明,制备的SnO2纳米粒子呈球状,尺寸在10~20 nm,纳米颗粒均匀,分散性好。以该粉体为基础制备了相应的气敏元件,测定了气体灵敏度与温度和稀土元素掺杂的关系。研究测试表明,纳米SnO2半导体气敏元件对NO2气体有着良好的响应-恢复特性,并且具有较高的灵敏度和较低的工作温度。稀土元素铈的掺杂能明显提高纳米SnO2粉体的气敏性能。

The nano-SnO2 and Ce3＋ doped SnO2 powders were prepared by ultrasonic atomization and co-precipitation method with SnCl4 and CO（NH2）2 as raw materials.The effects of the ultrasonic spraying condition,the reaction time and chemical composition on the morphology of SnO2 nano-powder and size were carefully investigated.And a focused study on the chemical processing condition of the zinc hydroxide dehydrated to SnO2 nano-powder was carried out.The XRD and SEM were employed to characterize the phase and morphology of the particle size.The results showed that the prepared spherical nanosized SnO2 had narrow size distribution between 10 and 20 nm.The gas sensitive elements were fabricated based on the obtained nanopowders.The relation of gas sensitivity between temperature and doping element were measured.The investigations revealed that the SnO2 gas sensitive element had good response-recovery curves,higher sensitivity and lower operating temperature.And the introduction of Ce into SnO2 nano-powder could improve its gas sensing characteristics obviously.