超薄氧化铝模板的制备及应用

Review of the preparation and application of ultra-thin alumina mask

基板上大面积的有序纳米阵列,在电子学、光电子学、传感器、催化剂、太阳能电池、高密度储存、场发射设备和超薄显示设备等领域具有广阔的应用前景。综述了一种构造表面有序纳米结构的新方法———超薄氧化铝模板法。根据超薄氧化铝模板的制备方法又分为附着型和结合型。还总结了近年来该方法的应用。

Large-scale arrays of nanostructures on substrates electronics, optoelectronics, sensing, catalyst, high-density s tra-thin display devices. Here, we review a new surface nano structures, in which ultra thin anodic alumina membranes are have many potential applications in areas such as torage, solar cells, field emission devices and ulpatterning approach in fabricating ordered nanoused as fabrication masks. According to the fabrication method, two different types of ultra thin alumina masks exist： attached UTAM and connected UTAM. In this paper, applications of ultra thin alumina masks have been reviewed in recent years.