摘要
提出一种基于玻璃的空气质量流量传感器,该传感器具有制造工艺简单、测试范围宽和抗流体冲击能力强的特点。通过CFD软件模拟了传感器芯片在各种情况下的温度场分布,得到了流速与芯片上下游温差的关系曲线,理论分析表明基于玻璃的流量传感器最大流可测速可达10m/s。采用半导体工艺制备了基于玻璃的流量传感器,通过测试得到了芯片的输出信号电压和流速的关系曲线,在流速范围为0～10m/s时,输出信号电压没有出现饱和现象。当芯片表面掠过流速为10m/s时,测得芯片放大信号电压可达1.51V。
In this aritcle,an air mass flow sensor based on glass has been presented.The advantages of this sensor are simple production technology;wide test range and strong resistance of fluid shock.The temperature field in different condition of this flow sensor is simulated through CFD software,and the relation curve between temperature difference and flow velocity is obtained.In theory,the max measurable flow velocity of this glass based flow sensor can reach 10 m/s.The semi-conductor techology has been used to produce this flow sensor,and the relation curve between output voltage singal and flow velocity is obtained through test.When flow velocity range from 0 to 10 m/s,output voltage has no saturation phenomenon.When the flow velocity is 10 m/s,the output signal can reach about 1.5 V.
出处
《传感技术学报》
CAS
CSCD
北大核心
2010年第11期1546-1549,共4页
Chinese Journal of Sensors and Actuators
基金
广东省自然科学基金项目资助(10451802904006046)
关键词
玻璃衬底
温差式
空气流量传感器
glass substrate
temperature difference
air flow sensor
