摘要
以层层自组装单壁碳纳米管网状薄膜为敏感材料,在柔性基底上制作了应变传感器,并对薄膜和器件性能进行了测试。测试结果表明:薄膜组装均匀,电导性良好,电阻随组装层数增加呈指数态下降;器件对应变呈现较好的敏感特性、线性响应和可恢复性,灵敏度为4.25;通过添加防护层屏蔽外界湿度及光照影响,传感器稳定性显著提高。该传感器可用于弯曲表面的应力应变检测。
Based on single -walled carbon nanotube network thin films deposited on flexible polyethytlene films with layer - by -layer self-assembly method,strain sensors were developed with microelectronic process.Both the films and the sensors were characterized.SEM images show the films are uniform.The experimental data show the films have good electric conductivity property and the resistance of the film decays exponentially with the increase of the number of layers.The sensors show different resistivity for different strains with prompt and nearly linear response,as well as they achieve their strain sensitivity up to 4.25.The stability is remarkably improved by coating protective film on the surface of the device,with which device becomes less vulnerable to humidity and lightness.These flexible sensors can be used on curved surfaces.
出处
《功能材料与器件学报》
CAS
CSCD
北大核心
2010年第6期610-616,共7页
Journal of Functional Materials and Devices
关键词
碳纳米管
自组装
柔性
应变
传感器
carbon nanotube
self - assembly
flexible
strain sensor