一种金属桥冲击片雷管集成制造方法

A Method for Fabricating An Integrated Metal Slapper Detonator

重点阐述了使用MEMS工艺将冲击片雷管的金属桥、反射片、飞片和加速膛集成为一体的制造方法.该方法较之2005年报道的硅集成冲击片雷管制造方法有两方面改进：一是采用金属桥替代多晶硅桥,从而使雷管作用时间缩短到2ms以内;二是使用硅-氧化硅-硅结构（SOI）材料代替单晶硅,从而使硅飞片厚度误差控制在±3mm以内.试验结果表明改进后的金属桥冲击片雷管在3.14kA电流下能够起爆HNS-IV炸药.

This paper describes a method of fabricating an inte^xated slapper detonator based on the MEMS technology, which includes metal bridge, tamper, flyer and barrel. There are two advantages compared to the formerly method. Using the metal as the bridge medium, the function time of the detonator is less than 2Bs. Substituting SO1 for silicon, the error of the flyer thickness can be less than 3prn. The test results show that the HNS-IV explosive can be ignited under 3.14kA by the improved metal slapper detonator.