摘要
应用反应动力学方法建立基元反应速率方程并按工艺条件进行耦合，得出了以宏观工艺参数表达的提纯速率方程。这种方程便于计算，能指导工艺优化并容易为工程师应用。
The reaction kinetics methods for constructing the speed equations of element reaction,which,then,coupled with the technlogy practice,the purity speed equation described by macroscopic parameters was obtained.This equation,which can be easily used by engineers,possesses the characters of simplifying the calculations,and leading to technology optimum.The calculating results of this equation are fitted into the experimental data well.
出处
《半导体技术》
CAS
CSCD
北大核心
1999年第4期32-35,共4页
Semiconductor Technology
基金
国家自然科学基金
