摘要
在分析了非晶硅(a-Si)材料的模型后,提出了一种能够反映a-Si材料结构特点的无规网络模型。以此模型为基础,用MonteCarlo方法模拟计算了能量为0.5~2.5MeV的电子束与a-Si的相互作用,得到了一些对电子辐照实验有参考价值的结果。
After analysing amorphous silicon(aSi),the paper puts forward a nonregular network model which can mirror the structure feature of aSi.We calculated the interaction between electron beam with energy from 05 to 25MeV and aSi by means of the Monte Carlo simulation and the nonregular network model,and obtained some results which would have some reference value to the electron irradiation experiments.
出处
《半导体技术》
CAS
CSCD
北大核心
1999年第4期36-40,共5页
Semiconductor Technology
基金
国务院侨办重点学科科研基金
关键词
非晶硅
电子辐照
模拟计算
Amorphous siliconsElectron irradiationMonte Carlo simulation