摘要
本文基于 Ｃ Ｉ Ｆ 版图格式的数据结构，开发了一个高压功率器件的版图自动生成器，并利用该软件设计了一个具有双层浮空场板的高压功率 Ｌ Ｄ Ｍ Ｏ Ｓ的版图．通过实验测试，其结果达到了预先设计 ６００ Ｖ 的要求．并且在器件单元横向尺寸优化值给定的情况下。
Based on the data structure of the layout format CIF,a layout automating generator of the high voltage and power device is developed in this papaer,and a layout of the 600V power LDMOS transistor with double layers of floating field plate is designed by it.By the experimental test the results are satisfied with the design expectation.The power device design cycle is decreased significantly by this method when the optimum cell size of the device is determined.
