摘要
对铁电薄膜的开关特性进行了分析．介绍了利用美国ＨＰ４１９２Ａ低频阻抗分析仪设计铁电薄膜开关特性测量仪的方法．讨论了测量原理以及如何利用测量仪所产生的双极性双脉冲对铁电薄膜的开关特性进行测量。
The switching characteristics of ferroelectric
thin films are analyzed. The ways and means are described utilizing American HP4192A LF
Impedance Analyzer to design a measuring instrument of switching characteristics with
ferroelectric thin film. The measuring principle and the use of bipolar double pulse generated by
measuring instrument for measuring switching characteristics with ferroelectric thin films are
discussed. Measurement result of the samples of PZT(55/45) ferroelectric thin films is given.
出处
《华中理工大学学报》
CSCD
北大核心
1999年第6期10-12,共3页
Journal of Huazhong University of Science and Technology
基金
国家高技术研究发展计划资助
关键词
铁电薄膜
开关特性
测量
铁电存储器
ferroelectric thin films
swithching characteristics
measurement
bipolar double pulse
