关于静电激发器的数学方法分析

Mathematical Analysis of the Electrostatic Actuator

着重研究脉冲电压控制的静电微电子力学系统开关的无阻尼动力学响应,对于系统产生的非线性常微分方程,运用能量方法研究其解的存在性,进而分析了静电激发器的一些简单性质.

In this paper, we study the dynamics response of an Undamped electrostatic actuator described by a nonlinearity ordinary differential equation. Using energy method, we obtain the existence of the solution and some characters of the electrostatic actuator.