水热法制备ZrO_2高折射率薄膜

PREPARATION OF ZrO 2 COATING WITH HIGH REFRACTIVE INDEX BY HYDRO THERMAL PROCESS

以 Ｚｒ Ｏ Ｃｌ２·８ Ｈ２ Ｏ 为原料，采用水热法和溶胶凝胶工艺制备颗粒度为几至几十纳米的 Ｚｒ Ｏ２水溶胶，再以甲氧基乙醇转换为醇溶胶，用旋转镀膜法制备了高折射率 Ｚｒ Ｏ２ 薄膜。应用原子力显微镜及台阶仪测试了膜表面微观形貌，获得了膜的红外光谱，并用椭偏仪测得薄膜厚度与折射率。研究了薄膜厚度、折射率与热处理温度的关系，并就有机粘接剂 Ｐ Ｖ Ｐ 对 Ｚｒ Ｏ２ 薄膜折射率及机械强度的影响作了初步探讨。

A new method to prepare ZrO 2 coating with high refractive index from inorganic precursor (ZrOCl 2·8H 2O) is reported. ZrO 2 sol with particle size from several to tens nanometer is prepared by hydro thermal process. The water in the sol is then replaced with methoxyethanol by distillation. The ZrO 2 coatings are prepared with spin coating method. The surface micro morphology of the film are detected by atom force microscope and α step apparatus. The infrared transmittance spectra of the films are also obtained. The film thickness and refractive index are measured by ellipsometer, and their relationship with the temperature of thermal treatment is investigated. The influences of the incorporating organic binder PVP(polyvinyl pyrrolidone)on the refractive index and the scratch resistance of the film are also discussed briefly.