摘要
介绍 B靶制备技术及其质量厚度测量方法。静电振动、高压电喷和离心沉淀主要用于制备有衬 B靶,而聚焦重离子束溅射和电子轰击可用来制备自支撑 B靶和有衬 B靶。 B靶的质量厚度用分光光度法和称重法测量。
The methods of producing boron films on backings by centrifugal precipitation,electrospraying and electricity vibration are presented. Techniques for preparing self supporting B targets between 0 045 and 0 45 mg/cm 2 from isotopic boron by electron bombardment or focused ion beam sputtering are discussed. Microscope slides coated with betaine or Ni plates are used as substrates from which strong B foils with little residual stress are floated. A spectrophotometer has been used to measure the mass thickness of B targets prepared by electron bombardment.
出处
《原子能科学技术》
EI
CAS
CSCD
北大核心
1999年第4期357-359,363,共4页
Atomic Energy Science and Technology
关键词
电子轰击
重离子束溅射
硼靶
薄膜
Electron bombardment Focused ion beam sputtering Electrospraying Spectrophotometer