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自支撑Mg靶膜的制备 被引量:3

PREPARATION OF Mg SELF SUPPORTING TARGET FOIL
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摘要 用真空蒸发法成功制备了1700~1961 μg/cm 2 的薄自支撑 M g 靶膜和90~95 μm 的厚自支撑 M g 靶膜。甜菜碱是制备 Mg 靶膜有效的解离剂。讨论了真空蒸发制靶过程中的主要技术难点。 Magnesium metal self supporting target foil is prepared by means of the vacuum evaporation. Betaine H 2O solution is found to be a reliable and useful stripping agent for Mg foil preparation.The key techniques in the vacuum evaporation procedure are described.
作者 王秀英
出处 《原子能科学技术》 EI CAS CSCD 北大核心 1999年第4期366-367,共2页 Atomic Energy Science and Technology
关键词 自支撑 真空蒸发 解离剂 镁靶膜 Self supporting Mg foil Vacuum evaporation Stripping agent
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  • 2张继成,王占山,吴卫东,许华.Au/Gd多层膜的制备和表征[J].材料导报,2005,19(F05):81-82. 被引量:1
  • 3高凤菊,郑瑞廷,程国安.自支撑薄膜制备的研究进展[J].材料导报,2007,21(6):1-3. 被引量:9
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