摘要
用真空蒸发法成功制备了1700~1961 μg/cm 2 的薄自支撑 M g 靶膜和90~95 μm 的厚自支撑 M g 靶膜。甜菜碱是制备 Mg 靶膜有效的解离剂。讨论了真空蒸发制靶过程中的主要技术难点。
Magnesium metal self supporting target foil is prepared by means of the vacuum evaporation. Betaine H 2O solution is found to be a reliable and useful stripping agent for Mg foil preparation.The key techniques in the vacuum evaporation procedure are described.
出处
《原子能科学技术》
EI
CAS
CSCD
北大核心
1999年第4期366-367,共2页
Atomic Energy Science and Technology
关键词
自支撑
真空蒸发
解离剂
镁靶膜
Self supporting Mg foil Vacuum evaporation Stripping agent