真空沉积掺杂制备PARYLENE功能薄膜研究

Study on preparation of nanopowder-doped PARYLENE functional films in vacuum

本文介绍了高分子材料PARYLENE的真空沉积机理及其优越性和不足。提出了一种在PARYLENE真空沉积过程中引入机械掺杂制备具有特定功能的PARYLENE高分子薄膜的方法并给出了掺杂试验设备设计方案。最后提出了影响机械粉体掺杂效果的几个因素。

Describing the advantages of the polymer PARYLENE films and disadvantages of their deposition process invacuum,a modified deposition method was proposed where the SiO2 and TiO2 nanopowder was doped into the films with aspecially designed centrifugal mechanism introduced in the preparation to enhance the films＇ resistance to heat and ultraviolet light.With the design of the mechanical doping setup expounded,some influencing factors on the result of mechanical nanopowder doping process were discussed.