复合分子泵转子离心变形与热变形的有限元分析

FEA of centrifugal distortion and thermal deformation of rotor in composite molecular pump

本文利用有限元分析软件ANSYS12.0对复合分子泵转子的离心变形与热变形进行了分析。通过施加惯性载荷和温度载荷,得到转子的离心变形与热变形。对不同载荷下分析结果的比较,了解了惯性载荷与温度载荷对分子泵转子变形影响大小。通过分析结果可直观了解分子泵在高速运转过程中转子变形情况,对分子泵设计时工作间隙的选取有重要的参考意义。

The centrifugal distortion and thermal deformation of the rotor in composite molecular pump were analyzed by the FEA software ANSYS12.0 under inertia and thermal loads.Comparing the analyzed results under the two different loads,the effects of both loads on the centrifugal distortion and thermal deformation of the rotor were revealed,thus making the FEA results available to show visually how the rotor deforms when the molecular pump is running at high speed.So,the analysis is of importance to the choice of the operating clearance between rotor and stator in the design of molecular pump.