可见与远红外分色滤光片的研制

Study and fabrication of far-infrared and visible separation filter

分色滤光片对成像光谱技术起着重要的作用。本文介绍了一种多通道成像系统中使用的宽光谱分色滤光片,实现了在锗基底上45°倾斜使用时,将0.65～1.1μm和8～12μm光谱分成两束光。借助OptiLayer膜系设计软件,得到易于制备的膜系结构,经过多次实验,确定合理的工艺参数,最终得到了光谱性能和理化性能较好的分色片。

Far-infrared and visible separation filter plays an important role in imaging spectrum technique. In this paper, a kind of separation filter used in muhichannel imaging system is introduced, It can divide 0. 65 - 1.1 μm and 8 - 12 μm light into two beams of light when it is used at 45 degrees on Ge base. By using OptiLayer software, we have obtained the structure of film which is easy to preparation, and determinated the reasonable technique parameters after many experiments. Finally we make the filter with well optical and physics characteristics.