摘要
根据在研VUV FTS分束器的技术要求 ,进行采用Al+MgF2 材料制作紫外 真空紫外波段分束膜的实验研究。理论上通过数据计算分析了膜层选材及设计的可行性 ,制备了Al+MgF2 分束膜 ,建立了以Seya Namioka单色仪为主体的实验装置 ,测量了紫外熔石英基底上镀制分束膜 5°入射的光谱特性 ,给出结果分析。扩大了Al+MgF2
Al+MgF 2 thin films were grown by successive vacuum deposition of Al and MgF 2.The possibility of using Al+MgF 2 thin films as beamsplitters in vacuum ultraviolet Fourier transform spectrometer and the film growth technique were theoretically and experimentally studied.The spectral characteristics of the films grown on ultraviolet fused quartz substrate were investigated with a home made apparatus based on Seya Namioka monochrometer.
出处
《真空科学与技术》
EI
CSCD
北大核心
1999年第5期326-330,共5页
Vacuum Science and Technology
基金
中国科学院长春光学精密机械研究所应用光学国家重点实验室基金
关键词
Al+MgF2
真空紫外
傅立叶变换
光谱仪
分束膜
Al+MgF 2 film,Ultraviolet and vacuum ultraviolet,Fourier transform spectrometer,Beamsplitter film,Relative efficiency