离子镀膜中的弧电流对膜层质量的影响

Influence of Arc Current on Film Properties in Multi arc Ion Plating

论述了电弧电流对多弧离子镀膜层的硬度、厚度及其外观形貌的影响 ,并进一步阐述了电弧电流在实际应用中的作用 ,说明了镀制不同功能的膜层 。

Films were grown by multi arc ion plating on W18Cr4V substrates.Influence of the arc current on the properties of the film,such as,its hardness,thickness and surface topography were studied.We suggest that arc current control can be very important in growing different high quality functional films.