动态流量法超高真空标准装置

Standard Ultra High Vacuum System Based on Dynamic Flow Technique

研制成功的动态流量法超高真空标准装置是一台用来校准真空规的绝对真空计量标准。装置由校准系统、微流量计系统、抽气系统和计算机控制系统组成。校准系统采用四球结构 ,校准球室直径为50 0mm。极限真空度为 6 5× 10 - 9Pa ,校准范围为 10 - 2 ～ 10 - 7Pa ,不确定度为 3% (10 - 2 ～ 10 - 6 Pa)和10 % (10 - 7Pa)。

Based on dynamic flow technique,a new standard ultra high vacuum (UHV) system was developed by Lanzhou Institute of Physics,which is an absolute vacuum standard and can be used for vacuum gauge calibration.It consists of a calibration system,a flow meter,a pumping set up and a computer control unit.The calibration system include four sphere structure and a vacuum chamber of 500 mm in diameter.The maximum high vacuum reaches 6 5×10 -9 Pa with a calibration range of 10 -2 ～10 -7 Pa and an uncertainties of 3%(10 -2 ～10 -6 Pa) and 10%(10 -7 Pa),respectively.