摘要
本文介绍了一种新型超高真空辅助设备——低温水泵。用之和分子泵组合，可以获得１０－８Ｐａ的清洁超高真空。用在半导体集成电路生产过程中，可以使产品质量以及生产效率均得到改善和提高。抽气机理以及设计要点均在文中有所论述。
Abstract A new type UHV supplement water pump is introduced. Combined with turbo pump,high vacuum to 10 8 Pa can be obtained. In some production process, such as semiconductor industries the qualities are improved while the pump down time reduction in signification.The configuration and designing essential are briefed.
出处
《真空》
CAS
北大核心
1999年第4期34-36,共3页
Vacuum
