全柔性微位移放大机构的设计与分析

Design and analysis of fully compliant micro-displacement amplification mechanisms

微机械放大器中常采用全柔性微位移放大机构来实现输出位移的放大,且大多采用短臂柔性铰链连接各构件。设计了一种对称的长柔性杆微位移放大机构,结合弹性力学和Bernoulli-Eu-ler假设,推导出该放大机构的力位移计算公式及放大比公式。对影响该机构放大比的关键因素进行了分析,通过实例分析得到该机构中的长柔性杆角度与输出位移之间的关系。同时用有限元方法对该实例进行了仿真分析,并对两种方法所得结果进行了分析比较。

Fully compliant micro-displacement amplification mechanism is usually designed to be utilized as displacement amplifier.Usually small-length flexible hinge is used to joint all components in the amplification mechanism.A symmetrical micro-displacement amplification mechanism of flexible beams was designed,combined with Elasticity and Bernoulli-Euler assumption,the force-deflection relationship and the amplification ratio were derived.Key factors of the amplification ratio were analyzed,and the relationships between angles of the flexible beams and the output displacements were discussed and explained through an example analyzing.With the aid of finite element analysis,finally,the results of the two methods were compared.