摘要
PMN-PT是一种综合性能优异的新型热释电材料。本文以PMN-PT单晶作为热释电探测器材料,开展了8×1线列探测器的芯片结构设计及器件关键工艺研究,获得了8元热释电探测器芯片,电压响应率约280V/W。同时,实现了8元热释电光敏芯片与8元读出电路的耦合互连,得到了8元热释电焦平面原型器件,并进行了性能测试。由于读出电路对可见光存在响应,影响了焦平面模块的热释电信号提取,电路设计有待改进。本文的研究为基于新型弛豫铁电单晶的大规模非制冷焦平面的研制奠定了一定的基础。
PMN-PT single crystal is a novel pyroelectric material with superior performances. An 8× 1 linear array was designed, and research on the key processes of device fabrication was carried out based on PMN-PT crystal. The responsivity of the 8×1 chip was about 280 V/W. At the same time, the 8×l pyroelectric chip was coupled with an 8×1 read-out circuit. The performance of the 8× 1 FPA was studied. The pyroelectric signal of the FPA device can＇t be measured because the read-out circuits respond to visible light. The design of read-out circuits needs to be improved. The results of the paper lay a foundation for the development of large-scale uncooled pyroelectric FPA based on novel ferroelectric single crystals
出处
《光电工程》
CAS
CSCD
北大核心
2011年第2期46-50,共5页
Opto-Electronic Engineering
基金
国家自然科学基金资助项目(60708028
60837003)
