宽范围可调MEMS集成滤波器的设计与制作

Design and Fabrication of Wide Tunable Range MEMS Integrated Filters

基于MEMS平面螺旋电感和MEMS可调平行板电容设计并制作了一种宽可调范围的集成可调带通滤波器。理论分析并计算了可调滤波器电感和可调电容的取值范围,利用HFSS设计得到各元件结构参数,并使用AnsoftDesigner分析软件对可调滤波器电路进行了模拟仿真。设计得到的可调滤波器中心频率调节范围为400～700MHz,可调率达75%,实现了宽范围可调,3dB相对带宽范围为5%～10%,插入损耗小于5dB,芯片尺寸为20mm×6mm×0.4mm。给出了一套基于MEMS平面工艺的MEMS集成可调滤波器的制作流程,实现了MEMS集成可调滤波器的工艺制作及测试。测试结果表明,获得的可调滤波器实现了通带频率宽范围可调。

A wide tunable range integrated tunable band-pass filter was designed and fabricated based on the MEMS planar spiral inductors and MEMS tunable parallel plate variable capacitors.The inductance and capacitance of the tunable filter were analyzed and calculated theoretically,the structure parameters were designed by HFSS,and the circuit of the tunable filter was simulated by Ansoft Designer software.The wide tunable range filter was designed with a tunable center frequency of 400-700 MHz,the tunable ratio of 75%,a 3 dB fractional bandwidth range of 5%-10%,the in-band loss of 5 dB,and the chip size of 20 mm×6 mm×0.4 mm.A process scheme of the MEMS integrated tunable filter was presented based on the MEMS surface micro-machining technology.The fabrication and measurement of the MEMS integrated tunable filter were realized.The measurement results show that the obtained filter has a wide tunable range.