高能球磨法制备硅锗合金

The Preparation of The Aloy of Silicon and Germanium by High--energy Ball--milling Method

以硅粉、锗粉为原料，用高能球磨法制备硅锗合金。采用X-射线衍射（XRD）、扫描电镜（SEM）以及能谱仪（EDS）研究了粉体随球磨时间的物相转变过程。结果表明，硅粉与锗粉经球磨时间为80h后合成出分散程度较高的SiGe二元合金。

The alloy of silicon and germanium are prepared by the method of high--energy ball--milling. The transformation of phase composition of single phase SiGe powders are investigated by the X--ray diffraction （XRD）, scanning electron microscopy （SEM） and energy disperse spectroscopy （EDS）. It is found that the high dispersed alloy of SiGe are synthesized by 80h high--energy ball--milling method for the composition of silicon and germanium.