多模脊形光波导的制备及其耦合对准和损耗测量系统

Fabrication of the Muti-Mode Rib-Waveguide and Its Coupling and Wasting Measurement System

垂直腔面发射激光器,目前在光互连中有着越来越广泛的应用。是一种波长为850 nm的多模激光器,其光输出截面达50μm×50μm,为了更好的匹配该器件,需要研制大截面多模脊形波导,并且为了满足芯片间光互连的需求,对互连波导长度具有较高的要求。通过改进制备工艺,研制了直线长度为21 cm的多模聚硅氧烷脊形波导,并成功完成了通光实验;搭建了一套对波导完全无损伤的测量系统,实现了对多模脊形光波导的无损伤测量,测得损耗平均值为约0.18 dB/cm,并利用传统的截断法进行了验证。此外,该系统还可以用于不可见光波段的耦合对准。

Nowadays, an important device called vertical cavity surface emitting laser is applied into optical interconnection more and more widely, it works at 850 nm and its output cross section is 50μm×50 μm. In order to fit to this device, a muti-mode rib waveguide with a big cross section is needed. And the distance among chips needs longer the waveguide. A waveguide which is 21 cm long with a big section is fabricated through advancing the making technology and light can go through it successfully. A measurement system is also designed and the average wasting of the waveguide as 0.18 dB/cm is gotten which is verified through cutting-off method. Also, this system can be applied to adjusting the coupling of the waveguide input with invisible light.