脉冲激光对CCD成像器件的破坏机理研究

Mechanism Research of Pulsed-Laser Induced Damage to CCD Imaging Devices

针对脉冲激光辐照CCD造成其输出图像出现不可恢复的白色亮线和全场黑屏的破坏现象,通过测量驱动电极与衬底之间的阻值,观察光斑区域不同分层的破坏形貌和检测输出波形等方法,研究了CCD的破坏机理。研究表明:高能量的脉冲激光造成了CCD各分层不同程度的熔融烧蚀,使暗电流和漏电流大幅增加,导致了CCD的破坏。

Aiming at the phenomenon that irreversible bright line and all-field blank screen happens in the CCD irradiated by pulsed laser, the resistance between driving electrodes and substrate is measured, damage micro- morphological image of different layers in the facular area is observed, exported waveforms are detected, and the damage mechanisms for CCD are analyzed in detail. The results show that high power pulse laser induces the ablation at different layers of CCD, and increases the dark current and leakage current, which leads the failure of the device.