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CVD金刚石自支撑膜的力学性能 被引量:2

Mechanical Properties of CVD Freestanding Diamond Film
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摘要 CVD金刚石自支撑膜已经作为一种崭新的工程材料出现,其应用日益广泛,急切需要对其力学行为进行深入了解。为此对有关金刚石膜的断裂强度和断裂韧度的研究,以及金刚石膜的断裂机制进行了详尽的论述。简略介绍了金刚石膜的断裂强度和断裂韧度的测试方法,给出了典型的测试数据。最后就如何提高金刚石膜的力学性能和更好地应用这种新型工程材料提出了建议。 As an emerging brand new type of engineering material for a variety of important high technology applications,a deep understanding of the mechanical behavior of the freestanding diamond films has become an urgent task of vital importance.The purpose of this review article is to present state-of-the-art researches on the fracture strength and toughness,and the fracture mechanisms of this engineering material.Testing methods of the fracture strength and fracture toughness of the freestanding diamond film were introduced briefly.Typical data were presented.Suggestions in the improvement of mechanical properties and more safe and efficient use of this kind of new engineering material were discussed.
出处 《热处理》 CAS 2011年第1期1-9,共9页 Heat Treatment
基金 国家自然科学基金委员会的项目资助(合同号:2005007和50872010)
关键词 金刚石自支撑膜 力学性能 断裂强度 断裂韧度 CVD free-standing diamond film mechanical property fracture strength fracture toughness
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