3D-MEMS加速度计性能试验研究

Research on 3D-MEMS Accelerometer Performance Test

研究了一种新型三维MEMS加速度计的性能特点和工作原理。针对加速度计的输出接口特点,设计了基于数字信号处理(DSP)芯片的数据采集系统,实现对加速度计信号的高速实时采集。利用多通道缓存串行口MCBSP实现SPI总线方式的数据采集,并采用2个DMA控制器实现了数据的实时传输和存储。基于设计的DSP数据采集系统,对采集的数据进行了处理,分析了加速度计在一定温度下的偏值稳定性和输出重复性,评估了加速度计的性能。

A novel three-dimensional MEMS accelerometer performance characteristics and working principles were studied.For the features of the accelerometer output interface,a data acquisition system was designed based on digital signal processing（DSP） chip,to realize the accelerometer signal high-speed real-time acquisition.used multi-channel buffered serial port MCBSP to achieve SPI bus（mode of） data collection.And the real-time data transmission and storage was achieved by the use of two DMA controllers.Based on the design of DSP data acquisition system,the collected data were processed,the partial values of the stability and output repeatability of the accelerometer at a certain temperature were analyzed,and the performance of accelerometers were assessed.