非晶硅薄膜太阳能电池激光除边工艺研究

Research of laser edge deletion technology of a-Si: H thin film solar cell

为了解决在非晶硅薄膜太阳能电池的制备中,喷砂除边工序存在污染大、加工一致性不佳等问题,使用1064nm脉冲光纤激光器,在加工速率3500mm/s、功率30W、重复频率80kHz、填充线间距0.05mm的参量下,完成了激光除边,获得了清除区电阻大于1000MΩ的样品。根据实验效果确定了最佳光斑交叠比,x和y方向的最佳比值分别为0.83和0.88。结果表明,激光功率足够时,光斑交叠情况会明显影响除边的效率和效果,扫描速率应与重复频率和填充线间距匹配,从而在最佳效率下获得理想的加工效果。

In the manufacture of a-Si： H thin film solar cell, sandblasting edge deletion has some disadvantages of pollution and poor conformity. Laser edge deletion was carried out with a 1064nm pulsed fiber laser under the conditions of 3500mm/s scan speed, 30W output power, 80kHz frequency and 0.05mm line space. The resistance of the specimen was larger than 1000MΩ. The best beam spot overlap ratio was acquired according to the experimental results, and the ratio in x and y direction was 0.83 and 0.88 respectively. It showed that beam spot overlap status influenced deletion efficiency and effect obviously with enough output power. Scan speed should match with frequency and line space to obtain the best processing effect with the optimal efficiency.