YAG激光参量对刻蚀微坑形貌的影响

Effect of YAG laser parameters on etching crater morphology

为了增加单次激光脉冲刻蚀微坑的深度,提高加工效率,利用双声光调制技术,通过对比不同能量密度的脉冲激光刻蚀微坑深度,及对比两种激光器输出的激光脉冲刻蚀微坑形貌,研究了激光参量对刻蚀微坑形貌的影响。结果表明,脉冲能量密度为20.21J/cm^2时,刻蚀微坑深度达到最大值,继续增加能量密度时,微坑深度将随之减小;相比于单腔激光器,双腔激光器刻蚀微坑深度从5μm增加至10μm,微坑直径从161μm降至134μm。

In order to increase the etching depth with one laser pulse and promote the production efficiency, the effect of laser parameters on the etching depth was studied by means of double acousto-optic modulation technique after comparing the laser pulse etching crater morphology under different pulse energy density and two different lasers. The results showed： when the pulse energy density was 20. 21J/cm2 , the etching crater depth reached the maximum, and when continuing to increase the energy density, the crater depth would be reduced; compared with single-cavity laser, the crater depth with two-cavities laser increased from 5μm to 10μm, and the crater diameter reduced front 161μm to 134μm.