摘要
对改良西门子法生产多晶硅的原则流程、理论基础,工艺流程的优缺点进行了阐述和分析;剖析了目前工业生产中的技术现状。
The principle flow,theoretical basis and technological process of improved Siemens process are presented and analyzed in this paper;and the technology status of industrial production at present is analyzed deeply in this paper.
出处
《云南冶金》
2011年第1期52-55,共4页
Yunnan Metallurgy
关键词
改良西门子法
理论基础
技术现状
improved siemens process
theoretical basis
technology status
