V_2O_5薄膜制备、结构及光学性质研究

Structural and Optical Properties of Reaction Evaporated Vanadium Pentoxide Films

Ｖ２Ｏ５薄膜是全固态电致变色器件中锂离子储存层的很好候选材料之一。本研究采用反应蒸发，优化实验条件，在加热基片上沉积了性能理想的Ｖ２Ｏ５薄膜，分别采用ＸＲＤ，ＡＥＳ，ＸＰＳ和紫外－近红外分光光度计研究了薄膜的晶态结构、组份、钒离子价态和光学等特性。研究结果表明，刚制备的薄膜为非晶结构，经过一定温度热处理后开始结晶，薄膜的组分为ＶＯ２．４６，含有少量的Ｖ＋４；吸收光谱存在两个不同的变化区域，高能区域对应于电子的带间跃迁，吸收边缘在２．１１ｅＶ。

Vanadium pentoxide film is a good candidate of Li+ storage layer in all-solid electrochromic device.In this paper,the films were prepared on the heated substrates by reaction evaporation of V2O5 powder and optimizing experimental conditions.The structure,composition and optical properties as well as valence state of V ions were investigated by use of XRD,AES,XPS and UV-365 double beam spectrophotometer, respectively.The experimental results have shown that the as-grown films are amorphous and are crystallized by heat treatment in O2 atmosphere;stoichiometry of the films is VO2.46;the optical absorption spectra of all films have exhibited two distinct regions of behavior:a high-energy region in which (h) 1/2 varied linearly with h , which is corresponding to the fundamental optical absorption edge (2.11eV) and a low-energy tail which is caused by self-impurity V+4.