电子级磷酸的纯化技术及其发展现状

Purification technology of electronicgrade phosphoric acid and present development status thereof

随着半导体芯片制造业和液晶显示器(LCD)制造业向中国转移,中国将逐步成为全球较大的LCD产业基地,中国电子级磷酸的需求量将日益增长,发展电子级磷酸已成为当前精细磷化工行业发展的必然趋势。电子级磷酸广泛应用于大规模集成电路(IC)、薄膜液晶显示器(TFT-LCD)、半导体等微电子工业等方面,用作清洗和蚀刻剂。详细介绍了电子级磷酸的应用领域、质量标准、纯化技术和国内外研究发展现状。

As the semiconductor chip and LCD manufacturing industries have transfered to China, China will gradually become a world＇s large LCD industrial base. Demand for electronic-grade phosphoric acid in China is growing, and the expansion of electronic-grade phosphoric acid production has become the inevitable trend of the development of fine phosphate chemical industry at present. Electronic-grade phosphoric acid is widely used in large scale integrated circuit （IC） ,thin film liquid crystal display （ TFT - LCD ） , semiconductor, and other microelectronics industries. Usually it is used as cleaning and etching agents. Application fields, quality standard, purification technology, and present R＆D status of electronic-grade phosphoric acid at home and abroad were introduced in detail.