低碎片激光等离子体软X射线源的实验研究

Experimental Study of a Low debris Laser produced Plasma Soft X ray Source

报道了一种以固态ＣＯ２为靶的低碎片激光等离子体软Ｘ射线源的初步研究结果，描述了光源的结构及自制的透射光栅谱仪，测量了该软Ｘ射线源的光谱辐射特性，并对它的污染情况进行了研究。

A low debris CO 2 target soft X ray source and a home made transmission grating spectrometer are described in this paper, the preliminary experimental results of spectral emission and debris measurement of the source are given.