超高分子量聚乙烯表面金属化及类金刚石薄膜沉积复合处理研究

The properties of the ultra-high molecular weight polyethylene(UHMWPE) modified by surface metallization and diamond-like carbon(DLC) film deposition duplex treatment

采用超高分子量聚乙烯(UHMWPE)表面金属化及类金刚石薄膜沉积复合处理工艺,提高超高分子量聚乙烯的耐磨性。首先采用磁过滤阴极真空弧源沉积技术(FCVA)在UHMWPE表面制备约30nm钛金属层,使UHMWPE表面金属化,然后再沉积DLC薄膜,研究结果表明,UHMWPE表面金属化后,DLC薄膜沉积过程中,电荷累积效应消除,使DLC薄膜的沉积速率、sp3键含量、硬度、耐磨性提高。

In this paper,ultra-high molecular weight polyethylene（UHMWPE） was modified by surface metallization and diamond-like carbon（DLC） film deposition duplex treatment to improve its wear resistance.Firstly titanium metal interlayer about 30nm was deposited on UHMWPE substrate by filtered cathodic vacuum arc（FCVA） technology to make UHMWPE metallization,then DLC film was deposited.The results indicated that the UHMWPE metallization can reduce UHMWPE surface charge accumulation during the DLC films deposition.As a result,the deposition rate,sp3 content,hardness and wear resistance of DLC films were increased.