压电式自感知微驱动器的研究

Study of the PZT micro-driver by self-sensing

利用压电材料具有正逆压电效应的特性,设计制作了压电式自感知微驱动器,同时实现了在一个器件中传感与驱动两种功能。通过Matlab软件仿真和实验,对该方法的正确性和可行性进行了验证,结果显示该方法可行,效果良好。

Using piezoelectric material characteristic by positive-negative piezoelectric effect, designed piezoelectric self-sensed microactuator to achieve sensing and actuating functions in one device. The method is feasible and effective through Matlab software simulation and experiments.