准直光束补偿法测量曲率半径研究

Measurement of spherical curvature with collimated beams compensation

针对球面光学元件曲率半径的测量问题,介绍了准直光束补偿法测量球面曲率半径的原理及测量步骤,并分析了提高测量精度的途径。该方法可以测量的球面曲率半径范围为一米至几十米,其测量相对标准偏差在±0.1%以下。

To improve the measurement precision of the spherical curvature,this paper introduces the measurement with collimated beams compensation.The testing rang of the method is about one meter to ten meters,and the measurement error is below ±0.1%.