摘要
为了提高光刻机工件台中微动台的运动精度和加速度,设计了一种将支承和驱动在同一电磁单元中实现的新型Lorentz电机驱动、磁悬浮支承、并联、6自由度微动台结构,应用解析方法建立了微动台磁场模型和特定结构约束下的磁场分布。对微动台电磁力-位移特性进行了分析。采用数值方法计算了微动台电磁单元绕组损耗引起的温升。结果表明:该微动台具有驱动力大、结构简单、散热方便等优点,可为我国自主产权光刻机微动台设计提供参考。
The wafer stage precision and acceleration is enhanced by a parallel six degree-of-freedom magnetic levitation（maglev） microstage actuated by a Lorentz motor.The microstage is designed with the bearing and actuating units in the same structure.The microstage electromagnetic field model is used to get an analytic expression for the magnetic field distribution and the electromagnetic force.The numerical method was used to analyze the nonlinear relationship between the electromagnetic force and the position and calculate the microstage temperature rise caused by the winding loss.The results indicate that the microstage has the advantages of large actuating force,compact struture and fast heat dissipation,and can be used for a domestic lithography stage.
出处
《清华大学学报（自然科学版）》
EI
CAS
CSCD
北大核心
2010年第12期1978-1982,共5页
Journal of Tsinghua University(Science and Technology)
基金
国家“八六三”高技术项目(2009AA04Z148)
国家“九七三”重点基础研究发展计划项目(2009CB724205)
关键词
微动台
电磁场计算
温升
光刻机
microstage
electromagnetic field calculation
temperature rise
lithography
