正弦电源驱动下氯化氪准分子灯的特性研究

Characteristics of Krypton Chloride Excimer Lamps Driven by Sinusoidal ECG

介绍了基于介质阻挡放电的氯化氪(KrCl*)准分子灯的光谱、输入功率以及222 nm的辐射效率.KrCl*准分子灯为同轴结构,内管和外管的内/外径分别为14/16,37.6/40 mm.灯内总气压为200 hPa,其中含2 hPa氯气和198 hPa氪气.KrCl*准分子灯由正弦电源驱动.测定辐照度后,通过Keitz公式计算222 nm的辐射功率,而灯的功率则通过示波器结合高压探头和电流互感器来测量.结果表明,KrCl*准分子灯在正弦电源频率48.4 kHz,输入功率150 W时222 nm辐射的最佳效率为5.3%.

The spectrum,input power and 222nm radiation efficiency were measured for coaxial KrCl＊ excimer lamps based on the dielectric barrier discharge（DBD）.The outer diameter（OD） of the inner tube of the lamp is 16mm with wall thickness of 2mm,while the OD of the outer tube is 40mm with wall thickness 1.2mm.The total pressure was 200hPa with chlorine 2hPa and krypton 198hPa.The lamps were driven by sinusoidal electronic control gear（ECG）.The 222nm radiation power was derived from irradiance,according to the Keitz formula.The input electric power was measured with an oscilloscope,combined with a voltage probe and a current probe.The results show the maximum efficiency of 222nm radiation is 5.3% with frequency of 48.4kHz and input power of 150W.