摘要
介绍了一种新近产生的被称为自由空间微光学平台（ Ｆ Ｓ Ｍ Ｏ Ｂ）的三维空间集成光学系统。并提出了一种用二氧化硅（ Ｓｉ Ｏ２）作光学材料、光刻胶和溅射铜（ Ｃｕ）薄膜作牺牲层、电镀铁镍（ Ｆｅ Ｎｉ）作支撑结构的制作自由空间微光学元件的新工艺。研制成功了多种与基底相垂直的三维位相型微光学元件。
A new three dimensional integrated optical system, termed free space micro optical bench (FS MOB), is described. We developed a new technique, which used the silica (SiO 2) as the optical material , photoresist and the spattered copper (Cu) thin film as the sacrificial layers, and the elecroplated ferronickel (FeNi) as the structure layer, to fabricate the free space micro optical elements. This technique offers a new approach to fabricate high quality phase micro optical elements for free space integrated micro optics and other applications. is described. We developed a new technique, which used the silica (SiO 2) as the optical material , photoresist and the spattered copper (Cu) thin film as the sacrificial layers, and the elecroplated ferronickel (FeNi) as the structure layer, to fabricate the free space micro optical elements. This technique offers a new approach to fabricate high quality phase micro optical elements for free space integrated micro optics and other applications.
出处
《微细加工技术》
1999年第3期58-64,共7页
Microfabrication Technology
