X射线反射式波带片衍射图形的深度误差效应

Error Effect in Depth of Diffraction Pattern of X Ray Reflection Zone Plate

研究 Ｘ 射线反射式波带片衍射图形制造过程中的深度误差效应。介绍了深度误差允差的计算方法及计算结果。给出实测结果，并讨论了在制造过程中减小深度误差的方法。

Error effect in depth of diffraction pattern of X ray reflection zone plate has been studied. The calculation method and results of the tolerance of error in depth for diffraction pattern are shown. The calculation results is compared with measured results. Some possibilities on decreasing the error in depth of diffraction pattern are also discussed.