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铁基SiN表面陶瓷的结构及耐酸性腐蚀行为

Structure of Iron Based Surface Silicon Nitride Ceramics and ITS Corrosion Resistant Behaviors To Acid Solution
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摘要 研究了铁基表面镀硅(~50nm 厚)经氮离子束处理(能量为 40ke V,剂量分别为5×1016,1×1017,5×1017cm - 2)后的表面结构和在 1 N H2 S O4 水溶液中的腐蚀行为。 T E M 证明,各试样表面均存在一完整的非晶层;电化学测量和失重实验表明,试样的失重量与浸泡时间满足幂函数规律;经表面处理过的试样,腐蚀电位提高了 30~40m V,腐蚀电流密度下降了 4~6 倍;耐腐蚀性随氮离子剂量的增大而不断提高。文章还结合腐蚀表面的粗糙度(分形维数)讨论了离子注入对表面结构和耐蚀性的影响。 The surface structure and it's corrosion behavior in 1N H 2SO 4 solution,for the pure iron deposited with silicon(~50nm)and bombarded with nitrogen ion (energy:40keV,dose:5×10 16 ,1×10 17 ,5×10 17 cm -2 respectively),were investigated by the methods of polarization electrochemistry,and mass loss with the help of atomic absorption spectroscopy for measuring the dissolved weight in solution as a function of soaking time.It has been shown that the cumulative mass loss is the power function of time,compared with the pure iron sample without treatment,the corrosion potential increases by 30~40mV,and the corrosion rate and corrosion current density are 4~6 times lower for the samples with cermet coating;the corrosion resistance increases with the dose increasing. TEM examination shows that integrated amorphous layer was formed but no second phase was found for the treated samples.
出处 《微细加工技术》 1999年第3期74-78,共5页 Microfabrication Technology
关键词 表面陶瓷材料 离子注入 表面结构 耐蚀性 Surface ceramics,Ion implantation,Surface layer structure,Corrosion behavior
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