双稳态MEMS电磁微继电器响应速度的分析

Analysis of the response of MEMS bi-stable electromagnetic microrelay

本文设计了一种基于微机电系统(MEMS)技术的新型双稳态电磁微继电器,并对影响其响应速度的因素进行了分析。测试后,结果表明,器件在运行过程中的脉冲间歇期间能够保持稳定状态而无需额外功耗;并且能够实现通过调节运行幅度,来提高器件的响应速度,最短的响应时间可以达到0.3ms。

The design of a novel bi-stable micro electro mechanical system（MEMS） electromagnetic microrelay is presented and the factors impacting the response of the miniaturized device are analyzed.The test results show that the microrelay can keep stable states without other power consumption and the response can be increased by tuning the operation distance of the rotor.The minimum response is up to 0.3ms.