金刚石膜中的黑色点状、块状和层状缺陷分析
摘要
0前言
化学气相沉积(CVD)方法制备的金刚石膜具有宽的光谱透过范围、高的热导率以及非常高的硬度,是一种极好的光学窗口材料。但是,即使在很高品质的金刚石膜中,仍常含有一种在透射光显微镜下呈现为黑色的显微缺陷。
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