移相干涉技术用于运动姿态精密测量

Phase-Shifting Interferometry for Measurement of Movement Attitude

针对测量系统运动中姿态测量的需求,提出了一种利用移相干涉技术测量角度的方法来实现运动姿态的准确测量。建立了由组合式移相干涉仪为主的三轴转角实验装置,该装置测量角度的分辨力优于0.006″。采用实验装置对微位移工作台运动过程中的姿态变化进行了测量,得到了工作台移动中绕三轴转角变化的测量结果,并利用激光小角度干涉仪进行了相关测量点的对比实验,数据最大偏差0.03″。实验结果验证了利用移相干涉测角法可以实现运动中姿态的精确测量。

In response to the demands for movement attitude measurements,an angle measurement method based on phase-shifting interferometry has been developed for accurate measurement of movement attitude.An experimental system for measuring three-axis angle with two phase-shifting interferometers is established,the resolution of which for angle measurement is better than 0.006″.The attitude change of micro-displacement table is measured while the table moves,and measurement results of table rotation around three axes are obtained.Measurement results of this system are compared with those of a small angle laser interferometer,and the maximum deviation is 0.03″.The angle measurement method based on phase shifting interferometry is proved to be able to achieve high precision measurements of attitude in motion.