期刊文献+

“半导体集成化芯片系统基础研究”重大研究计划结束综述 被引量:1

REVIEW OF THE ACHIEVEMENTS OF MAJOR PROGRAM"BASIC RESEARCH OF SEMICONDUCTOR SYSTEM ON CHIP"SUPPORTED BY NATIONAL NATURAL SCIENCE FOUNDATION OF CHINA
原文传递
导出
摘要 本文介绍了"半导体集成化芯片系统基础研究"重大研究计划立项背景、宗旨、总体科学目标、实施过程的基本情况以及取得的主要创新成果,并分析了目前我国在该领域仍然存在的差距和问题。 This paper briefly introduces the background, purpose, overall scientific goal, and reviews the execution and the major innovative achievement of a major program on "Basic Research of Semiconductor System on Chip" supported by National Natural Science Foundation of China'(NSFC). The problems and deficiencies that currently still exist in our country are analyzed in this field.
出处 《中国科学基金》 CSCD 北大核心 2011年第2期77-84,共8页 Bulletin of National Natural Science Foundation of China
关键词 重大研究计划 集成化芯片系统 创新成果 major program, system on chip, original innovation
  • 相关文献

同被引文献60

  • 1刘雄英,黄光周,范艺,于继荣.原子层沉积技术及应用发展概况[J].真空科学与技术学报,2006,26(z1):146-153. 被引量:12
  • 2申灿,刘雄英,黄光周.原子层沉积技术及其在半导体中的应用[J].真空,2006,43(4):1-6. 被引量:12
  • 3BAUTERS J F,HECK M J R,JOHN D,et al. Uhra-low-loss high-aspect-ratio SizN4 Waveguides [ J ]. Optics Express, 2011,19(4) :3163-3174.
  • 4LI S, REN L, YANG Z, et al. Fabrication of Nano Metallic Holes for Color Filters Based on a Controllable Self-assem-bly of Polystyrene Spheres [ J ]. Microelectronic Enginee-ring,2014,113 : 143-146.
  • 5ANTSON J, SUNTOLA T. Method for Producing Compound Thin Films : USA ,4058430[ P]. 1977-11-15.
  • 6LINDFORS S G, PAKKAI,A A J, SUNTOLA T S. Method for Performing Growth of Compound Thin Films:USA,4413022[P]. 1983-11-01.
  • 7SUNTOLA T. Atomic Layer Epitaxy [ J ]. Materials Science Reports, 1989,4 ( 5 ) : 261-312.
  • 8SESHAN K. Handbook of Thin Film Deposition [ M ]. New York :William Andrew Publishing,2012.
  • 9YAO T, TAKEDA T. Growth Process in Atomic Layer Epi- taxy of Zn Chalcogenide Single Crystalline Films on (100) GaAs [ J ]. Applied Physics Letters, 1986,48 ( 2 ) : 160- 162.
  • 10GEORGE S M. Atomic Layer Deposition : An Overview[ J 1. Chemical Reviews, 2009,110 ( 1 ) : 111-131.

引证文献1

二级引证文献2

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部