微型锂离子电池及关键材料的研究

Investigation of Microscale Lithium Ion Batteries and the Key Materials

当前的微型低能耗电子设备以及微机电系统(MEMS)器件大都使用传统的体积较大的外接电源供能,这就限制了这些微型器件的发展和应用。通过设计集成微型电源并将其与这些微器件一体化,可构筑自主微器件系统。本文主要综述了本课题组开展的与微电子技术兼容的全固态微型锂离子电池的研究,包括LiCoO2正极薄膜材料、固态电解质-电极LiPON/LiCoO2界面的研究以及微型锂离子电池制备工艺等。

Most low-power electronic and microelectromechanical system （MEMS） devices designed today use conventionally macroscopic external power supplies. This places limits on the functionality of these microdevices in many applications. An alternative solution is to design power sources at a microscale, which can be integrated together with these microdevices on the same chips. We mainly review the work done in our group on developing and studying of solid state microscale lithium ion batteries compatible with microeleetronics with respect to the material system employed, the solid state electrolyte-cathode interface, the batteries＇ microfabrication process and performance.