一种SRAM成品率专用测试结构的设计方法

Design method of SRAM-specific test structure for yield improvement

SRAM的成品率是半导体制造量产能否成功的关键。针对通用的工艺测试结构无法满足SRAM特殊要求的问题,阐述了一种SRAM成品率专用测试结构的设计方法。在SRAM原始版图的基础上改变设计以构造测试图形,并按阵列形式排布,有针对性地评估工艺环境造成的缺陷。研究结果表明该方法还原了产品电路的设计环境,能有效捕获违背SRAM特殊设计规则所造成的开路或短路缺陷,从而有助于快速修正设计误差,提升成品率。

Yield of SRAM is essential to mass-production of semiconductor products.Aiming at the incapacity of general test structures to meet special requirements of SRAM,a design method of SRAM-specific test structures for yield improvement was described.It was built based on the oriented SRAM cells which were modified and then rearranged into an array environment to collect information of process defect.Results indicate that this method is SRAM-product-oriented to capture open/short defect caused by violation of the special SRAM design rule,further to correct design error for yield improvement.